Inventor
Tomohide Jozaki
Inventor
Kanagawa, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%
Y10TTechnical subjects covered by former us classification25%
H01JElectric discharge tubes or discharge lamps15%
B65DContainers for storage or transport of articles or materials, e.g. bags, barrels, bottles, boxes, cans, cartons, crates, drums, jars, tanks, hoppers, forwarding containers10%
H02NElectric machines not otherwise provided for10%
C23CCoating metallic material5%
PatentTitleYear
7,036,673'Lot management production method and product carrying container'20066,655,000'Lot management production method and product carrying container'20036,320,737'Electrostatic chucking device'20016,235,655'Semiconductor manufacturing system and semiconductor manufacturing method'20016,204,193'Method for etching'20016,174,408'Method and apparatus for dry etching'20016,084,763'Method of holding wafer, method of removing wafer and electrostatic chucking device'20006,063,710'Method and apparatus for dry etching with temperature control'20005,981,913'Static electricity chuck and wafer stage'19995,968,273'Wafer stage for manufacturing a semiconductor device'19995,431,769'Method and system for plasma treatment'1995Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1995–2006Patents assigned to SONY CORP (11)· patent assignee history
1995–2006Based in Kanagawa, JP· patent location history
2001Based in Kagoshima, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SONY CORP | 11 | 1995–2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kanagawa, JP | 9 | 1995–2006 |
| Kagoshima, JP | 2 | 2001 |