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Inventor

Shang-Ying Wu

Inventor
Hsinchu County, TW

Overview

5→
Patents
2019–2021
Patent span
Physics
Primary field (CPC G)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
H01LSemiconductor devices13%
H05GX-ray technique13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
B08BCleaning in general6%
G02BOptical elements, systems or apparatus6%
G21KHandling of particles or ionising radiation not otherwise provided for6%
LOC226%
PatentTitleYear
D0931971Knife202110,875,060Method and apparatus for removing debris from collector202010,718,718EUV vessel inspection method and related system202010,656,539Radiation source for lithography process202010,429,314EUV vessel inspection method and related system2019

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2019–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (4)· patent assignee history
2019–2020Based in Hsinchu County, TW· patent location history
2021Patents assigned to WU SHANGJIE (1)· patent assignee history
2021Based in Dalian, CN· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD42019–2020
WU SHANGJIEself12021
Locations
LocationPatentsSpan
Hsinchu County, TW42019–2020
Dalian, CN12021