Inventor
Dennis Elliott Kamenitsa
Inventor
Austin, TX, US
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps23%
C01BNon-metallic elements15%
C01FCompounds of the metals beryllium, magnesium, aluminium, calcium, strontium, barium, radium, thorium, or of the rare-earth metals15%
C23CCoating metallic material15%
H01LSemiconductor devices15%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
PatentTitleYear
10,774,419Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products202010,087,520Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products20187,329,882'Ion implantation beam angle calibration'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2020Patents assigned to AXCELIS TECH INC (3)· patent assignee history
2008–2020Based in Austin, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| AXCELIS TECH INC | 3 | 2008–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Austin, Texas, US | 3 | 2008–2020 |