Inventor
Junling SUN
Inventor
US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1021%
H10DInorganic electric semiconductor devices14%
H01JElectric discharge tubes or discharge lamps7%
PatentTitleYear
12,080,599Methods for forming self-aligned contacts using spin-on silicon carbide202411,978,631Forming contact holes with controlled local critical dimension uniformity202411,495,436Systems and methods to control critical dimension (CD) shrink ratio through radio frequency (RF) pulsing202211,482,454Methods for forming self-aligned contacts using spin-on silicon carbide2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2024Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2022–2024Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2022–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 4 | 2022–2024 |