Inventor
Mathew Abraham
Inventor
Mountain View, CA, US
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H10DInorganic electric semiconductor devices13%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1013%
G02BOptical elements, systems or apparatus9%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices9%
H05GX-ray technique9%
C23CCoating metallic material4%
H01FMagnets2%
H01JElectric discharge tubes or discharge lamps2%
PatentTitleYear
11,013,096System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector202110,699,946Method of enabling seamless cobalt gap-fill202010,477,662System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector201910,362,664System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector201910,269,633Method of enabling seamless cobalt gap-fill20199,888,554'System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector'20189,842,769'Method of enabling seamless cobalt gap-fill'20179,685,371'Method of enabling seamless cobalt gap-fill'20179,570,307'Methods of doping substrates with ALD'20179,543,172'Apparatus for providing and directing heat energy in a process chamber'20179,378,941'Interface treatment of semiconductor surfaces with high density low energy plasma'20169,330,939'Method of enabling seamless cobalt gap-fill'20169,218,973'Methods of doping substrates with ALD'20156,433,663'High voltage transformer arrangement'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002Based in Indianapolis, IN, US· patent location history
2015–2020Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2015–2020Based in Mountain View, CA, US· patent location history
2016Patents assigned to ABRAHAM MATHEW (1)· patent assignee history
2016Patents assigned to FU XINYU (1)· patent assignee history
2018–2021Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2018–2021Based in San Diego, CA, US· patent location history
2021Patents assigned to ASML NETTHERLANDS B V (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2015–2020 |
| ASML NETHERLANDS BV | 4 | 2018–2021 |
| ABRAHAM MATHEWself | 1 | 2016 |
| ASML NETTHERLANDS B V | 1 | 2021 |
| FU XINYU | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Mountain View, California, US | 9 | 2015–2020 |
| San Diego, California, US | 4 | 2018–2021 |
| Indianapolis, IN, US | 1 | 2002 |