Inventor
Lakshman Deenadayalan
Inventor
Chennai, IN
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties25%
G05BControl or regulating systems in general25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
Y02PClimate change mitigation technologies in the production or processing of goods25%
PatentTitleYear
9,714,905'Wafer inspection recipe setup'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017Patents assigned to KLA TENCOR CORP (1)· patent assignee history
2017Based in Chennai, IN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Chennai, IN | 1 | 2017 |