Inventor
Sergey G. Belostotskiy
Inventor
Sunnyvale, CA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H01LSemiconductor devices24%
C23CCoating metallic material9%
H10NElectric solid-state devices not otherwise provided for3%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
PatentTitleYear
10,923,367Process chamber for etching low K and other dielectric films202110,096,496Process chamber for etching low K and other dielectric films20189,666,414'Process chamber for etching low k and other dielectric films'20179,601,301'Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment'20179,368,370'Temperature ramping using gas distribution plate heat'20169,165,783'Method of patterning a low-k dielectric film'20159,093,389'Method of patterning a silicon nitride dielectric film'20158,932,959'Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material'20158,802,572'Method of patterning a low-k dielectric film'20148,748,322'Silicon oxide recess etch'20148,580,693'Temperature enhanced electrostatic chucking in plasma processing apparatus'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2021Patents assigned to APPLIED MATERIALS INC (11)· patent assignee history
2013–2015Patents assigned to BELOSTOTSKIY SERGEY G (2)· patent assignee history
2013Patents assigned to CHAFIN MICHAEL G (1)· patent assignee history
2013Patents assigned to LIU JINGBAO (1)· patent assignee history
2013–2021Based in Sunnyvale, CA, US· patent location history
2014–2017Based in Santa Clara, CA, US· patent location history
2015Patents assigned to LUBOMIRSKY DMITRY (1)· patent assignee history
2016Based in Bellevue, WA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 11 | 2013–2021 |
| BELOSTOTSKIY SERGEY Gself | 2 | 2013–2015 |
| CHAFIN MICHAEL G | 1 | 2013 |
| LIU JINGBAO | 1 | 2013 |
| LUBOMIRSKY DMITRY | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 7 | 2013–2021 |
| Santa Clara, California, US | 3 | 2014–2017 |
| Bellevue, Washington, US | 1 | 2016 |