Inventor
Patrick Breiling
Inventor
Portland, OR, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material23%
H01JElectric discharge tubes or discharge lamps20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
H01LSemiconductor devices13%
B05CApparatus for applying fluent materials to surfaces, in general8%
B08BCleaning in general5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
B05BSpraying apparatus3%
C25DProcesses for the electrolytic or electrophoretic production of coatings3%
C30BSingle-crystal growth3%
PatentTitleYear
11,101,164Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition202110,984,987Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression202110,655,224Conical wafer centering and holding device for semiconductor processing202010,622,243Planar substrate edge contact with open volume equalization pathways and side containment202010,604,841Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition202010,214,816PECVD apparatus for in-situ deposition of film stacks20199,758,868'Plasma suppression behind a showerhead through the use of increased pressure'20179,399,228'Method and apparatus for purging and plasma suppression in a process chamber'20169,028,924'In-situ deposition of film stacks'20158,741,394'In-situ deposition of film stacks'20147,854,828'Method and apparatus for electroplating including remotely positioned second cathode'20107,413,616'Active rinse shield for electrofill chemical bath and method of use'20087,146,994'Active rinse shield for electrofill chemical bath and method of use'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2019Patents assigned to NOVELLUS SYSTEMS INC (7)· patent assignee history
2006–2021Based in Portland, OR, US· patent location history
2014Patents assigned to ALEXY JOHN (1)· patent assignee history
2014Patents assigned to ANTONELLI GEORGE ANDREW (1)· patent assignee history
2014Patents assigned to BREILING PATRICK (1)· patent assignee history
2017–2021Patents assigned to LAM RES CORP (6)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NOVELLUS SYSTEMS INC | 7 | 2006–2019 |
| LAM RES CORP | 6 | 2017–2021 |
| ALEXY JOHN | 1 | 2014 |
| ANTONELLI GEORGE ANDREW | 1 | 2014 |
| BREILING PATRICKself | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Portland, OR, US | 13 | 2006–2021 |