Inventor
Tyler Rockwell
Inventor
Wakefield, MA, US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps77%
H01LSemiconductor devices8%
H10NElectric solid-state devices not otherwise provided for8%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
PatentTitleYear
11,056,319Apparatus and system having extraction assembly for wide angle ion beam202110,276,340Low particle capacitively coupled components for workpiece processing201910,224,181Radio frequency extraction system for charge neutralized ion beam201910,193,066Apparatus and techniques for anisotropic substrate etching20199,865,433'Gas injection system for ion beam device'20189,514,912'Control of ion angular distribution of ion beams with hidden deflection electrode'20168,907,300'System and method for plasma control using boundary electrode'20148,698,108'Ion beam measurement system and method'20147,723,697'Techniques for optical ion beam metrology'20107,675,047'Technique for shaping a ribbon-shaped ion beam'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2014Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (4)· patent assignee history
2010–2019Based in Wakefield, MA, US· patent location history
2016–2019Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (5)· patent assignee history
2019Based in Lynnfield, MA, US· patent location history
2021Patents assigned to APPLIED MATERIALS INC (1)· patent assignee history
2021Based in Wakefield, RI, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 5 | 2016–2019 |
| VARIAN SEMICONDUCTOR EQUIPMENT | 4 | 2010–2014 |
| APPLIED MATERIALS INC | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Wakefield, Massachusetts, US | 8 | 2010–2019 |
| Wakefield, RI, US | 1 | 2021 |
| Lynnfield, Massachusetts, US | 1 | 2019 |