Inventor
Suguru Hirokawa
Inventor
Saijo, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
G05DSystems for controlling or regulating non-electric variables9%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests9%
Y10TTechnical subjects covered by former us classification9%
PatentTitleYear
10,957,511Electron source and production method therefor20219,666,413'Ion implantation apparatus and control method for ion implantation apparatus'20177,597,531'Method of controlling mover device'20097,187,143'Mover device and semiconductor manufacturing apparatus and method'20075,608,223'Ion implantation device'19975,525,807'Ion implantation device'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996–1997Patents assigned to EATON CORP (2)· patent assignee history
1996–1997Based in Saijyou, JP· patent location history
2007Patents assigned to SUMITOMO EATON NOVA (1)· patent assignee history
2007–2009Based in Saijo, JP· patent location history
2009Patents assigned to SEN CORP AN SHI AND AXCELIS CO (1)· patent assignee history
2017Patents assigned to SUMITOMO HEAVY IND ION TECH CO LTD (1)· patent assignee history
2017Based in Ehime, JP· patent location history
2021Patents assigned to DENKA COMPANY LTD (1)· patent assignee history
2021Based in Shibukawa, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EATON CORP | 2 | 1996–1997 |
| DENKA COMPANY LTD | 1 | 2021 |
| SEN CORP AN SHI AND AXCELIS CO | 1 | 2009 |
| SUMITOMO EATON NOVA | 1 | 2007 |
| SUMITOMO HEAVY IND ION TECH CO LTD | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Saijo, JP | 2 | 2007–2009 |
| Saijyou, JP | 2 | 1996–1997 |
| Shibukawa, JP | 1 | 2021 |
| Ehime, JP | 1 | 2017 |