Inventor

Masahiro Miyagi

Inventor
Kyoto, JP

Overview

28→
Patents
1979–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 28 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01LSemiconductor devices17%
B08BCleaning in general9%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices6%
B21DWorking or processing of sheet metal or metal tubes, rods or profiles without essentially removing material4%
Y10TTechnical subjects covered by former us classification4%
B05CApparatus for applying fluent materials to surfaces, in general3%
B05DProcesses for applying fluent materials to surfaces, in general3%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests3%
B01DSeparation2%
PatentTitleYear
10,946,314Pressure control device202110,907,665Pressure control device202110,761,422Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method202010,629,459Substrate processing apparatus202010,468,273Substrate processing method201910,133,173Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method20189,997,378Substrate processing apparatus and substrate processing method20189,972,515Substrate processing apparatus and substrate processing method20189,852,931Substrate processing apparatus20179,713,822'Substrate processing apparatus'20179,640,382'Substrate processing apparatus and substrate processing method'20179,601,357'Substrate processing device and substrate processing method'20179,576,808'Substrate processing apparatus and substrate processing method'20179,396,974'Substrate processing apparatus and substrate processing method'20169,165,798'Substrate processing apparatus and substrate processing method'20159,142,433'Substrate processing apparatus and substrate processing method'20158,883,030'Substrate processing apparatus and substrate processing method'20148,815,048'Substrate processing apparatus and substrate processing method'20147,958,899'Substrate cleaning apparatus and substrate cleaning method'20117,169,269'Plating apparatus, plating cup and cathode ring'20075,975,098'Apparatus for and method of cleaning substrate'19995,763,892'Ultraviolet irradiator for substrate, substrate treatment system, and method of irradiating substrate with ultraviolet light'19984,898,232'Heat exchanger and process for producing the same'19904,698,904'Apparatus for assembling fins and tubes for heat exchangers'19874,597,171'Tube-enlarging press for use in heat exchanger fabrication'19864,593,756'Fin-and-tube type heat exchanger'19864,566,359'Method of stacking fins of heat exchangers'19864,142,392'Internally groove forming apparatus for heat exchanging pipes'1979

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1979–1990Patents assigned to HITACHI LTD (6)· patent assignee history
1979Based in Ohiramachi, JP· patent location history
1986–1990Based in Tochigi, JP· patent location history
1998–2018Patents assigned to DAINIPPON SCREEN MFG (8)· patent assignee history
1998–1999Based in Shiga, JP· patent location history
2007–2020Based in Kyoto, JP· patent location history
2014–2020Patents assigned to SCREEN HOLDINGS CO LTD (15)· patent assignee history
2014–2017Patents assigned to MIYAGI MASAHIRO (6)· patent assignee history
2014–2017Patents assigned to HASHIMOTO KOJI (3)· patent assignee history
2021Based in Kanagawa, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SCREEN HOLDINGS CO LTD152014–2020
DAINIPPON SCREEN MFG81998–2018
HITACHI LTD61979–1990
MIYAGI MASAHIROself62014–2017
HASHIMOTO KOJI32014–2017
Locations
LocationPatentsSpan
Kyoto, JP182007–2020
Tochigi, JP51986–1990
Kanagawa, JP22021
Shiga, JP21998–1999
Ohiramachi, JP11979