Inventor
Denis Alexandrovich Glushkov
Inventor
Alfter, DE
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H05GX-ray technique17%
B82YSpecific uses or applications of nanostructures13%
G21KHandling of particles or ionising radiation not otherwise provided for13%
G02BOptical elements, systems or apparatus8%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
G01NInvestigating or analysing materials by determining their chemical or physical properties4%
H01JElectric discharge tubes or discharge lamps4%
PatentTitleYear
10,964,523Laser-pumped plasma light source and method for light generation20219,964,852Source collector apparatus, lithographic apparatus and method20189,897,930'Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical element'20189,841,680'Source collector apparatus, lithographic apparatus and method'20179,476,841'High-brightness LPP EUV light source'20169,448,492'Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus'20169,307,624'Lithographic apparatus'20169,082,521'EUV multilayer mirror with interlayer and lithographic apparatus using the mirror'20158,454,849'Imprint lithography'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2018Patents assigned to ASML NETHERLANDS BV (7)· patent assignee history
2013–2018Patents assigned to GLUSHKOV DENIS ALEXANDROVICH (5)· patent assignee history
2013–2018Patents assigned to BANINE VADIM YEVGENYEVICH (4)· patent assignee history
2013–2018Patents assigned to YAKUNIN ANDREI MIKHAILOVICH (3)· patent assignee history
2013–2018Based in Alfter, DE· patent location history
2015–2018Patents assigned to SJMAENOK LEONID AIZIKOVITCH (3)· patent assignee history
2015–2018Based in Witten, DE· patent location history
2016–2021Based in Nieuwegein, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 7 | 2013–2018 |
| GLUSHKOV DENIS ALEXANDROVICHself | 5 | 2013–2018 |
| BANINE VADIM YEVGENYEVICH | 4 | 2013–2018 |
| SJMAENOK LEONID AIZIKOVITCH | 3 | 2015–2018 |
| YAKUNIN ANDREI MIKHAILOVICH | 3 | 2013–2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Alfter, DE | 4 | 2013–2018 |
| Witten, DE | 3 | 2015–2018 |
| Nieuwegein, NL | 2 | 2016–2021 |