Inventor
AELAN MOSDEN
Inventor
US
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
B82YSpecific uses or applications of nanostructures13%
H10DInorganic electric semiconductor devices13%
H01JElectric discharge tubes or discharge lamps12%
C23FNon-mechanical removal of metallic material from surface4%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices4%
PatentTitleYear
12,593,634Selective gas phase etch of silicon germanium alloys202612,575,353Method for lateral etch with bottom passivation202612,512,327Surface modification to achieve selective isotropic etch202512,272,558Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification202512,002,683Lateral etching of silicon202411,837,467Plasma etching techniques202311,715,643Gas phase etch with controllable etch selectivity of metals202311,538,691Gas phase etch with controllable etch selectivity of Si-containing arc or silicon oxynitride to different films or masks202211,538,690Plasma etching techniques202211,482,423Plasma etching techniques202211,424,120Plasma etching techniques202211,380,554Gas phase etching system and method202211,322,350Non-plasma etch of titanium-containing material layers with tunable selectivity to alternate metals and dielectrics202211,189,499Atomic layer etch (ALE) of tungsten or other metal layers2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to TOKYO ELECTRON LTD (14)· patent assignee history
2021–2026Based in US· patent location history
2023Patents assigned to TOYKO ELECTRON LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 14 | 2021–2026 |
| TOYKO ELECTRON LTD | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 14 | 2021–2026 |