Inventor
KOUSUKE YOSHIHARA
Inventor
JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices19%
B05CApparatus for applying fluent materials to surfaces, in general12%
B05DProcesses for applying fluent materials to surfaces, in general8%
B01DSeparation4%
B08BCleaning in general4%
H05BElectric heating4%
H10KOrganic electric solid-state devices4%
PatentTitleYear
11,720,026Developing treatment method, computer storage medium and developing treatment apparatus202311,476,136Substrate processing apparatus and method of adjusting substrate processing apparatus202211,465,168Liquid processing device and liquid processing method202211,342,198Processing liquid supplying apparatus and processing liquid supplying method202211,235,350Solution treatment apparatus and cleaning method for solution treatment apparatus202211,141,758Film forming method, storage medium, and film forming system2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2023Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
2021–2023Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 6 | 2021–2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 6 | 2021–2023 |