LexDanaLexDanabeta
Inventor

Vidya Ramanathan

Inventor
Clifton Park, NY, US

Overview

2→
Patents
2018–2019
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions25%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light13%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
H01LSemiconductor devices13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
PatentTitleYear
10,203,200Analyzing root causes of process variation in scatterometry metrology20199,903,711'Feed forward of metrology data in a metrology system'2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018–2019Patents assigned to KLA TENCOR CORP (2)· patent assignee history
2018Patents assigned to KLA—TENCOR CORP (1)· patent assignee history
2018Based in Milpitas, CA, US· patent location history
2019Based in Clifton Park, NY, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KLA TENCOR CORP22018–2019
KLA—TENCOR CORP12018
Locations
LocationPatentsSpan
Clifton Park, New York, US12019
Milpitas, California, US12018