Inventor
YUMIKO KAWANO
Inventor
JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H01LSemiconductor devices17%
B05DProcesses for applying fluent materials to surfaces, in general15%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1013%
H10DInorganic electric semiconductor devices6%
B82YSpecific uses or applications of nanostructures2%
PatentTitleYear
12,540,394Selective film formation using self-assembled monolayer202612,538,504Film formation method202612,456,620Film-forming method202512,387,926Selective film formation using self-assembled monolayer202512,341,004Film formation method and film formation apparatus202512,183,572Film formation method and film formation device202412,152,304Film forming method for forming self-assembled monolayer on substrate202411,869,927Method of manufacturing semiconductor device202411,830,741Method for forming film202311,788,185Film formation method and film formation device202311,598,001Film forming method2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2026Patents assigned to TOKYO ELECTRON LTD (11)· patent assignee history
2023–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 11 | 2023–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 11 | 2023–2026 |