Inventor
Rene Oesterholt
Inventor
Vught, NL
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices59%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1041%
PatentTitleYear
8,368,902'Lithographic apparatus and method for calibrating the same'20137,880,901'Lithographic apparatus and method for calibrating the same'20117,859,686'Lithographic apparatus and method for calibrating the same'20107,528,965'Lithographic apparatus and method for calibrating the same'20097,502,096'Lithographic apparatus, calibration method, device manufacturing method and computer program product'20097,408,655'Lithographic apparatus and method for calibrating the same'20087,374,957'Method of calibrating or qualifying a lithographic apparatus or part thereof, and device manufacturing method'20087,292,312'Lithographic apparatus and method for calibrating the same'20077,256,871'Lithographic apparatus and method for calibrating the same'20077,239,368'Using unflatness information of the substrate table or mask table for decreasing overlay'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2013Patents assigned to ASML NETHERLANDS BV (10)· patent assignee history
2007–2013Based in Vught, NL· patent location history
2007–2009Based in 's-Hertogenbosch, NL· patent location history
2013Patents assigned to LEVASIER LEON MARTIN (1)· patent assignee history
2013Patents assigned to LOOPSTRA ERIK ROELOF (1)· patent assignee history
2013Patents assigned to OESTERHOLT RENE (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 10 | 2007–2013 |
| LEVASIER LEON MARTIN | 1 | 2013 |
| LOOPSTRA ERIK ROELOF | 1 | 2013 |
| OESTERHOLT RENEself | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Vught, NL | 5 | 2007–2013 |
| 's-Hertogenbosch, NL | 5 | 2007–2009 |