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Inventor

IBUKI HAYASHI

Inventor
JP

Overview

1→
Patents
2025
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material25%
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
12,385,132Substrate processing apparatus and substrate processing method2025

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2025Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD12025
Locations
LocationPatentsSpan
JP12025