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Inventor

Arend Koolma

Inventor
Veldhoven, NL

Overview

1→
Patents
2018
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
10,120,290Fluid handling structure, immersion lithographic apparatus, and device manufacturing method2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018Patents assigned to ASML NETHERLANDS BV (1)· patent assignee history
2018Based in Veldhoven, NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV12018
Locations
LocationPatentsSpan
Veldhoven, NL12018