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Inventor

YUZO OHISHI

Inventor
JP

Overview

2→
Patents
2022
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
B05CApparatus for applying fluent materials to surfaces, in general13%
B08BCleaning in general13%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices13%
G06FElectric digital data processing13%
PatentTitleYear
11,469,115Substrate processing apparatus, substrate processing method and recording medium202211,443,964Substrate processing apparatus and substrate processing system2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2022Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22022
Locations
LocationPatentsSpan
JP22022