Inventor
John Boniface
Inventor
San Jose, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01JElectric discharge tubes or discharge lamps20%
H01LSemiconductor devices12%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems8%
C23CCoating metallic material8%
C23FNon-mechanical removal of metallic material from surface8%
H05HPlasma technique8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
H10BElectronic memory devices4%
PatentTitleYear
10,784,118Atomic layer etching using a combination of plasma and vapor treatments202010,256,108Atomic layer etching of AL201910,153,282Ultra-high vacuum transport and storage20188,398,875'Method of orienting an upper electrode relative to a lower electrode for bevel edge processing'20137,922,866'Apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer'20117,662,254'Methods of and apparatus for aligning electrodes in a process chamber to protect an exclusion area within an edge environ of a wafer'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2020Patents assigned to LAM RES CORP (6)· patent assignee history
2010–2013Based in Santa Clara, CA, US· patent location history
2013Patents assigned to BAILEY III ANDREW D (1)· patent assignee history
2013Patents assigned to BONIFACE JOHN D (1)· patent assignee history
2013Patents assigned to SCHOEPP ALAN M (1)· patent assignee history
2013Patents assigned to SEXTON GREGORY S (1)· patent assignee history
2018–2020Based in San Jose, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 6 | 2010–2020 |
| BAILEY III ANDREW D | 1 | 2013 |
| BONIFACE JOHN Dself | 1 | 2013 |
| SCHOEPP ALAN M | 1 | 2013 |
| SEXTON GREGORY S | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 3 | 2018–2020 |
| Santa Clara, California, US | 3 | 2010–2013 |