LexDanaLexDanabeta
Inventor

Toru HAYASAKA

Inventor
JP

Overview

4→
Patents
2022–2024
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices25%
H05HPlasma technique25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
12,165,842Control method and plasma processing apparatus202411,742,181Control method and plasma processing apparatus202311,742,182Control method and plasma processing apparatus202311,476,089Control method and plasma processing apparatus2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2024Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2022–2024Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD42022–2024
Locations
LocationPatentsSpan
JP42022–2024