Inventor

Sriskantharajah Thirunavukarasu

Inventor

Singapore, SG

Overview

26→

Patents

2016–2021

Patent span

Electricity

Primary field (CPC H)

Patents· 26 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary

H01LSemiconductor devices30%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%

C23CCoating metallic material11%

H01JElectric discharge tubes or discharge lamps9%

B08BCleaning in general3%

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%

B22FWorking metallic powder1%

B25JManipulators1%

C22CAlloys1%

F27BFurnaces, kilns, ovens or retorts in general1%

PatentTitleYear

11,111,583Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity2021 11,053,590Nozzle for uniform plasma processing2021 10,978,334Sealing structure for workpiece to substrate bonding in a processing chamber2021 10,930,542Apparatus for handling various sized substrates2021 10,903,055Edge ring for bevel polymer reduction2021 10,847,400Adhesive-less substrate bonding to carrier plate2020 10,784,134Image based substrate mapper2020 10,777,442Hybrid substrate carrier2020 10,607,870Substrate carrier for active/passive bonding and de-bonding of a substrate2020 10,566,226Multi-cassette carrying case2020 10,549,324Method and apparatus for backside cleaning of substrates2020 10,504,762Bridging front opening unified pod (FOUP)2019 10,465,288Nozzle for uniform plasma processing2019 10,446,423Next generation warpage measurement system2019 10,347,516Substrate transfer chamber2019 10,325,790Methods and apparatus for correcting substrate deformity2019 10,262,877Apparatus and method for reducing substrate sliding in process chambers2019 10,154,586Apparatus and method for solid state source array design and fabrication2018 10,153,187Methods and apparatus for transferring a substrate2018 9,993,853Method and apparatus for backside cleaning of substrates2018 9,960,023Methods and apparatus for nodule control in a titanium-tungsten target2018 9,845,533Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity2017 9,818,624'Methods and apparatus for correcting substrate deformity'2017 9,740,111'Electrostatic carrier for handling substrates for processing'2017 9,595,464'Apparatus and method for reducing substrate sliding in process chambers'2017 9,478,697'Reusable substrate carrier'2016

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2016–2021Patents assigned to APPLIED MATERIALS INC (26)· patent assignee history

2016–2021Based in Singapore, SG· patent location history

2017Patents assigned to ELUMALAI KARTHIK (1)· patent assignee history

2017Patents assigned to LEW JEN SERN (1)· patent assignee history

2017Patents assigned to SUNDARRAJAN ARVIND (1)· patent assignee history

2017Patents assigned to THIRUNAVUKARASU SRISKANTHARAJAH (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
APPLIED MATERIALS INC	26	2016–2021
ELUMALAI KARTHIK	1	2017
LEW JEN SERN	1	2017
SUNDARRAJAN ARVIND	1	2017
THIRUNAVUKARASU SRISKANTHARAJAHself	1	2017

Locations

Location	Patents	Span
Singapore, SG	26	2016–2021