Inventor
Mizuna Suganuma
Inventor
Yokohama, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps67%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
PatentTitleYear
10,032,603Charged particle beam lithography apparatus and charged particle beam lithography method20189,852,885Charged particle beam writing method, and charged particle beam writing apparatus20179,484,185'Charged particle beam writing apparatus, and charged particle beam writing method'20169,224,578'Charged particle beam writing apparatus and method for acquiring dose modulation coefficient of charged particle beam'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2018Patents assigned to NUFLARE TECHNOLOGY INC (4)· patent assignee history
2015Based in Kanagawa, JP· patent location history
2016–2018Based in Yokohama, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NUFLARE TECHNOLOGY INC | 4 | 2015–2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yokohama, JP | 3 | 2016–2018 |
| Kanagawa, JP | 1 | 2015 |