Inventor
Günter Nowinski
Inventor
Unterwellenborn, DE
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Sprimary
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light40%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
G05BControl or regulating systems in general20%
Y02PClimate change mitigation technologies in the production or processing of goods20%
PatentTitleYear
6,941,259'Laser software control system'20056,822,977'Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser'20046,700,916'E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004Patents assigned to LAMBDA PHYSIK AG (2)· patent assignee history
2004Based in Unterwellenborn, DE· patent location history
2005Patents assigned to LAMDA PHYSIK AG (1)· patent assignee history
2005Based in Goettingen, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAMBDA PHYSIK AG | 2 | 2004 |
| LAMDA PHYSIK AG | 1 | 2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Unterwellenborn, DE | 2 | 2004 |
| Goettingen, DE | 1 | 2005 |