Inventor
YUJI AKATSUKA
Inventor
JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01JElectric discharge tubes or discharge lamps15%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling7%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form7%
C04BLime, magnesia7%
H02NElectric machines not otherwise provided for7%
H05BElectric heating7%
C09JAdhesives4%
PatentTitleYear
12,191,183Wafer placement table and method of manufacturing the same202512,027,385Ceramic heater202412,009,245Member for semiconductor manufacturing apparatus and method for manufacturing the same202411,837,490Electrostatic chuck heater202311,715,652Member for semiconductor manufacturing apparatus202311,398,401Wafer mounting table and method of manufacturing the same2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to NGK INSULATORS LTD (6)· patent assignee history
2022–2025Based in JP· patent location history
2023Patents assigned to NGL INSULATORS LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NGK INSULATORS LTD | 6 | 2022–2025 |
| NGL INSULATORS LTD | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 6 | 2022–2025 |