Inventor

Yoshiaki Kohama

Inventor

Kawasaki, JP

Overview

1995–2010

Patent span

Electricity

Primary field (CPC H)

Patents· 14 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary

H01JElectric discharge tubes or discharge lamps64%

G01NInvestigating or analysing materials by determining their chemical or physical properties36%

PatentTitleYear

RE041665'Object observation apparatus and object observation'2010 7,439,502'Electron beam apparatus and device production method using the electron beam apparatus'2008 RE040221'Object observation apparatus and object observation'2008 7,244,932'Electron beam apparatus and device fabrication method using the electron beam apparatus'2007 6,958,477'Electron beam apparatus, and inspection instrument and inspection process thereof'2005 6,953,944'Scanning device and method including electric charge movement'2005 6,677,587'Electron beam apparatus, and inspection instrument and inspection process thereof'2004 6,670,602'Scanning device and scanning method'2003 6,518,582'Electron beam apparatus, and inspection instrument and inspection process thereof'2003 6,479,819'Object observation apparatus and object observation'2002 6,184,526'Apparatus and method for inspecting predetermined region on surface of specimen using electron beam'2001 5,780,853'Scanning electron microscope'1998 5,646,403'Scanning electron microscope'1997 5,466,936'Charged particle microscope'1995

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1995–2005Patents assigned to NIKON CORP (10)· patent assignee history

1995–2010Based in Kawasaki, JP· patent location history

1997–2008Based in Kanagawa, JP· patent location history

2005Based in Tokyo, JP· patent location history

2007–2008Patents assigned to EBARA CORP (2)· patent assignee history

2008–2010Patents assigned to NIPPON KOGAKU KK (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
NIKON CORP	10	1995–2005
EBARA CORP	2	2007–2008
NIPPON KOGAKU KK	2	2008–2010

Locations

Location	Patents	Span
Kawasaki, JP	9	1995–2010
Kanagawa, JP	4	1997–2008
Tokyo, JP	1	2005