Inventor

Eberhard Kuhn

Inventor

Hemhofen, DE

Overview

1977–2006

Patent span

Physics

Primary field (CPC G)

Patents· 26 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices49%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests14%

C08GMacromolecular compounds obtained otherwise than by reactions only involving unsaturated carbon-to-carbon bonds12%

C08LCompositions of macromolecular compounds10%

Y10TTechnical subjects covered by former us classification4%

C02FTreatment of water, waste water, sewage, or sludge2%

C07DHeterocyclic compounds2%

C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients2%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h102%

Y02WClimate change mitigation technologies related to wastewater treatment or waste management2%

PatentTitleYear

7,052,820'Silicon-containing resist for photolithography'2006 7,018,784'Process for increasing the etch resistance and for reducing the hole and trench width of a photoresist structure using solvent systems of low polarity'2006 6,946,236'Negative resist process with simultaneous development and aromatization of resist structures'2005 6,893,972'Process for sidewall amplification of resist structures and for the production of structures having reduced structure size'2005 6,770,423'Negative resist process with simultaneous development and silylation'2004 5,733,706'Dry-developable positive resist'1998 5,486,447'Negative resists with high thermal stability comprising end capped polybenzoxazole and bisazide'1996 5,281,335'Process, installation and reactor for biological treatment of waste water'1994 4,654,415'Method for the preparation of polyimide and polyisoindoloquinazoline dione precursors'1987 4,398,009'Polyoxazole precursor and the preparation thereof'1983 4,397,999'Polyimidazole and polyimidazopyrrolone precursor stages and the preparation thereof'1983 4,395,482'Method for the preparation of heat-resistant relief structures using positive resists'1983 4,385,165'Polyimide, polyisoindoloquinazoline dione, polyoxazine dione and polyquinazoline dione precursor stages and the manufacture'1983 4,371,685'Radiation-reactive precursor stages of highly heat-resistant polymers'1983 4,366,230'Method for the preparation of highly heat-resistant relief structures and the use thereof'1982 4,339,521'Heat resistant positive resists containing polyoxazoles'1982 4,332,883'Method for the manufacture of highly heat-resistant relief structures'1982 4,332,882'Method for the preparation of highly heat-resistant relief'1982 4,329,556'N-Azidosulfonylaryl-maleinimides'1982 4,311,785'Method for the preparation of highly heat-resistant relief structures and the use thereof'1982 4,292,398'Method for the preparation of relief structures by phototechniques'1981 4,287,294'Method for the preparation of relief structures by phototechniques'1981 RE030186'Method for the preparation of relief structures'1980 4,088,489'Method for the preparation of relief structures'1978 4,045,223'Method for the preparation of layer structures'1977 4,040,831'Method for the preparation of relief structures'1977

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1977–1998Patents assigned to SIEMENS AG (19)· patent assignee history

1977–1980Based in Erlangen, DE· patent location history

1981–2006Based in Hemhofen, DE· patent location history

1994Patents assigned to KUHN EBERHARD (1)· patent assignee history

1994Based in Ubstadt-Weiher, DE· patent location history

2004–2006Patents assigned to INFINEON TECHNOLOGIES AG (5)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
SIEMENS AG	19	1977–1998
INFINEON TECHNOLOGIES AG	5	2004–2006
KUHN EBERHARDself	1	1994

Locations

Location	Patents	Span
Hemhofen, DE	21	1981–2006
Erlangen, DE	4	1977–1980
Ubstadt-Weiher, DE	1	1994