Inventor
CHEN-YU LIU
Inventor
TW
Overview
Patents· 20 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
B05CApparatus for applying fluent materials to surfaces, in general4%
B05DProcesses for applying fluent materials to surfaces, in general4%
B65DContainers for storage or transport of articles or materials, e.g. bags, barrels, bottles, boxes, cans, cartons, crates, drums, jars, tanks, hoppers, forwarding containers3%
C07FAcyclic, carbocyclic or heterocyclic compounds containing elements other than carbon, hydrogen, halogen, oxygen, nitrogen, sulfur, selenium or tellurium3%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
B05BSpraying apparatus1%
C09DCoating compositions, e.g. paints, varnishes or lacquers1%
PatentTitleYear
12,593,390Electrostatic discharge prevention pump202612,581,897Liquid storage for facility chemical supply system202612,541,149Resist dispensing system and method of use202612,374,639Non-DMSO stripper for advance package metal plating process202512,347,727Treatment of spin on organic material to improve wet resistance202512,300,487Photoresist composition and method of forming photoresist pattern202512,292,684Adhesion layer for multi-layer photoresist202512,222,653Method for forming semiconductor structure202512,222,654Lithography method for positive tone development202512,210,283EUV photoresist with low-activation-energy ligands or high-developer-solubility ligands202512,135,501Method of manufacturing a semiconductor device202412,074,025Photoresist developer and method of developing photoresist202411,822,237Method of manufacturing a semiconductor device202311,769,678Liquid storage for facility chemical supply system202311,754,923Resist dispensing system and method of use202311,708,495Priming material for substrate coating202311,694,896Photoresist developer and method of developing photoresist202311,681,221EUV photoresist with low-activation-energy ligands or high-developer-solubility ligands202311,378,884Extreme ultraviolet photoresist and method202211,143,963Negative tone developer for extreme ultraviolet lithography2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (20)· patent assignee history
2021–2026Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 20 | 2021–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 20 | 2021–2026 |