Inventor
Kouji Takuma
Inventor
Koshi, JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1042%
H01LSemiconductor devices25%
G05BControl or regulating systems in general17%
B08BCleaning in general8%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors8%
PatentTitleYear
11,062,930Substrate processing device and substrate conveying method202111,043,399Substrate processing apparatus and operation method of substrate processing apparatus202110,043,692Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program20188,509,937'Processing apparatus and operating method therefor'20138,447,422'Substrate processing apparatus, substrate processing method, and storage medium'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2021Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2013Patents assigned to TAKUMA KOUJI (2)· patent assignee history
2013Patents assigned to YOSHIDA MASAHIRO (1)· patent assignee history
2013–2021Based in Koshi, JP· patent location history
2013Based in Kumamoto, JP· patent location history
2018Patents assigned to TOKYO ELECTRONICS LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 4 | 2013–2021 |
| TAKUMA KOUJIself | 2 | 2013 |
| TOKYO ELECTRONICS LTD | 1 | 2018 |
| YOSHIDA MASAHIRO | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Koshi, JP | 4 | 2013–2021 |
| Kumamoto, JP | 1 | 2013 |