Inventor
Hari Pathangi Sriraman
Inventor
Chennai, IN
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices11%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry5%
B05DProcesses for applying fluent materials to surfaces, in general5%
B82YSpecific uses or applications of nanostructures5%
C01BNon-metallic elements5%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
G06FElectric digital data processing5%
G06KGraphical data reading5%
G06NComputing arrangements based on specific computational models5%
PatentTitleYear
10,679,333Defect detection, classification, and process window control using scanning electron microscope metrology202010,551,741Method of forming a directed self-assembled layer on a substrate202010,359,706Integrated scanning electron microscopy and optical analysis techniques for advanced process control20198,338,296'Method for forming a catalyst suitable for growth of carbon nanotubes'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012Patents assigned to IMEC (1)· patent assignee history
2012Patents assigned to SRIRAMAN HARI PATHANGI (1)· patent assignee history
2012–2020Based in Leuven, BE· patent location history
2019–2020Patents assigned to KLA TENCOR CORP (2)· patent assignee history
2019–2020Based in Chennai, IN· patent location history
2020Patents assigned to ASM IP HOLDING BV (1)· patent assignee history
2020Patents assigned to IMEC VZW (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 2 | 2019–2020 |
| ASM IP HOLDING BV | 1 | 2020 |
| IMEC | 1 | 2012 |
| IMEC VZW | 1 | 2020 |
| SRIRAMAN HARI PATHANGIself | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Chennai, IN | 2 | 2019–2020 |
| Leuven, BE | 2 | 2012–2020 |