Inventor
Akira Fukunaga
Inventor
Tokyo, JP
Overview
Patents· 36 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material13%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1013%
H05KPrinted circuits6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
B01DSeparation4%
G01NInvestigating or analysing materials by determining their chemical or physical properties4%
Y10TTechnical subjects covered by former us classification4%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry3%
B22FWorking metallic powder3%
PatentTitleYear
8,784,636'Plating apparatus and plating method'20148,211,242'Substrate processing method, substrate processing apparatus, and control program'20127,498,261'Method and apparatus for forming metal film'20097,407,821'Substrate processing method'20087,374,584'Interconnects forming method and interconnects forming apparatus'20087,285,492'Method for processing substrate'20077,262,849'Method of polishing thin film formed on substrate'20077,217,653'Interconnects forming method and interconnects forming apparatus'20077,179,503'Method of forming thin metal films on substrates'20077,055,535'Holding unit, processing apparatus and holding method of substrates'20066,972,256'Method and apparatus for forming thin film of metal'20056,897,021'Reactive probe chip, composite substrate and method for fabrication of the same'20056,875,335'Electrolytic machining method and apparatus'20056,871,773'Composite metallic ultrafine particles and process for producing the same'20056,780,245'Method and apparatus of producing thin film of metal or metal compound'20046,776,919'Method and apparatus for etching ruthenium films'20046,745,784'Method of and apparatus for cleaning substrate'20046,743,395'Composite metallic ultrafine particles and process for producing the same'20046,740,242'Plating apparatus and method of managing plating liquid composition'20046,730,596'Method of and apparatus for forming interconnection'20046,709,555'Plating method, interconnection forming method, and apparatus for carrying out those methods'20046,602,396'Electrolytic machining method and apparatus'20036,558,478'Method of and apparatus for cleaning substrate'20036,554,205'Gas polishing method, gas polishing nozzle and polishing apparatus'20036,519,842'Method for mounting semiconductor device'20036,517,642'Method and apparatus of producing thin film of metal or metal compound'20036,447,632'Apparatus and nozzle device for gaseous polishing'20026,368,493'Electrolytic machining method and apparatus'20026,315,858'Gas polishing apparatus and method'20016,136,213'Gas polishing method'20005,894,131'Exhaust apparatus in ion implantation system'19995,788,828'Apparatus for detecting anions in water'19985,169,419'Gas adsorber for exhaust gas'19924,906,257'Method of and apparatus for treating waste gas from semiconductor manufacturing process'19904,861,578'Method of treating waste gas'19894,826,805'Gas absorber'1989Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1989–2014Patents assigned to EBARA CORP (36)· patent assignee history
1989Patents assigned to EBARA RES CO LTD (2)· patent assignee history
1989–2006Based in Kanagawa, JP· patent location history
1992Based in Fujisawa, JP· patent location history
1999–2002Based in Chigasaki, JP· patent location history
2002–2005Patents assigned to MORI YUZO (3)· patent assignee history
2003–2014Based in Tokyo, JP· patent location history
2012–2014Patents assigned to FUKUNAGA AKIRA (2)· patent assignee history
2012Patents assigned to INOUE YUKI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 36 | 1989–2014 |
| MORI YUZO | 3 | 2002–2005 |
| EBARA RES CO LTD | 2 | 1989 |
| FUKUNAGA AKIRAself | 2 | 2012–2014 |
| INOUE YUKI | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 21 | 2003–2014 |
| Kanagawa, JP | 11 | 1989–2006 |
| Chigasaki, JP | 3 | 1999–2002 |
| Fujisawa, JP | 1 | 1992 |