Inventor
Zin-Chang Wei
Inventor
Hsinchu, TW
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H01LSemiconductor devices11%
C23CCoating metallic material9%
G01NInvestigating or analysing materials by determining their chemical or physical properties9%
G06FElectric digital data processing9%
G06QInformation and communication technology [ict] specially adapted for administrative, commercial, financial, managerial or supervisory purposes9%
H01JElectric discharge tubes or discharge lamps9%
Y02PClimate change mitigation technologies in the production or processing of goods9%
F27BFurnaces, kilns, ovens or retorts in general6%
B24BMachines, devices, or processes for grinding or polishing3%
PatentTitleYear
10,113,233Multi-zone temperature control for semiconductor wafer20189,105,591'Rotatable and tunable heaters for semiconductor furnace'20159,023,664'Multi-zone temperature control for semiconductor wafer'20158,834,671'Apparatus and method for controlling silicon nitride etching tank'20148,536,491'Rotatable and tunable heaters for semiconductor furnace'20138,409,997'Apparatus and method for controlling silicon nitride etching tank'20138,404,572'Multi-zone temperature control for semiconductor wafer'20138,277,286'Slurry dispenser for chemical mechanical polishing (CMP) apparatus and method'20127,732,344'High selectivity etching process for metal gate N/P patterning'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2014Patents assigned to TAIWAN SEMICONDUCTOR MFG (5)· patent assignee history
2010–2018Based in Hsinchu, TW· patent location history
2012–2013Patents assigned to WEI ZIN-CHANG (4)· patent assignee history
2012–2013Patents assigned to CHERN CHYI-SHYUAN (2)· patent assignee history
2013Patents assigned to CHANG CHUN-LIN (2)· patent assignee history
2015–2018Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG | 5 | 2010–2014 |
| WEI ZIN-CHANGself | 4 | 2012–2013 |
| TAIWAN SEMICONDUCTOR MFG CO LTD | 3 | 2015–2018 |
| CHANG CHUN-LIN | 2 | 2013 |
| CHERN CHYI-SHYUAN | 2 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu, TW | 9 | 2010–2018 |