Inventor
Kenshiro Tamura
Inventor
Hachioji, JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
4,956,043'Dry etching apparatus'1990Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1990Patents assigned to HITACHI LTD (1)· patent assignee history
1990Based in Hachioji, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 1 | 1990 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hachioji, JP | 1 | 1990 |