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Inventor

Naohiro Shoda

Inventor
Wappingers Falls, NY, US

Overview

11→
Patents
1995–2016
Patent span
Electricity
Primary field (CPC H)

Patents· 11 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1021%
H01JElectric discharge tubes or discharge lamps13%
B82YSpecific uses or applications of nanostructures8%
G11BInformation storage based on relative movement between record carrier and transducer8%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
Y10TTechnical subjects covered by former us classification8%
C23CCoating metallic material4%
H01LSemiconductor devices4%
H10DInorganic electric semiconductor devices4%
PatentTitleYear
9,355,886'Conformal film deposition for gapfill'20168,728,958'Gap fill integration'20146,406,545'Semiconductor workpiece processing apparatus and method'20026,150,072'Method of manufacturing a shallow trench isolation structure for a semiconductor device'20005,992,046'Semiconductor wafer temperature measurement and control thereof using gas temperature measurement'19995,950,099'Method of forming an interconnect'19995,937,541'Semiconductor wafer temperature measurement and control thereof using gas temperature measurement'19995,689,140'Method for forming studs and interconnects in a multi-layered semiconductor device'19975,652,040'Magnetic recording medium'19975,529,953'Method of forming studs and interconnects in a multi-layered semiconductor device'19965,458,947'Magnetic recording medium'1995

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1995–2002Patents assigned to TOSHIBA KK (8)· patent assignee history
1995–1997Based in Tokyo, JP· patent location history
1996–1999Based in Wappingers Falls, NY, US· patent location history
1999Patents assigned to SIEMENS AG (2)· patent assignee history
1999Based in Gainsville, VA, US· patent location history
2002Based in Wappinger Falls, NY, US· patent location history
2014–2016Patents assigned to NOVELLUS SYSTEMS INC (2)· patent assignee history
2014Patents assigned to ASHTIANI KAIHAN (1)· patent assignee history
2014Patents assigned to DRAEGER NERISSA (1)· patent assignee history
2014–2016Based in Los Gatos, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOSHIBA KK81995–2002
NOVELLUS SYSTEMS INC22014–2016
SIEMENS AG21999
ASHTIANI KAIHAN12014
DRAEGER NERISSA12014
Locations
LocationPatentsSpan
Wappingers Falls, New York, US31996–1999
Los Gatos, California, US22014–2016
Gainsville, Virginia, US21999
Tokyo, JP21995–1997
Wappinger Falls, New York, US12002