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Inventor

Ikuo Sawada

Inventor
Nirasaki, JP

Overview

13→
Patents
1992–2016
Patent span
Electricity
Primary field (CPC H)

Patents· 13 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01JElectric discharge tubes or discharge lamps19%
H01LSemiconductor devices9%
C23CCoating metallic material6%
E21BEarth or rock drilling6%
H05HPlasma technique6%
B05DProcesses for applying fluent materials to surfaces, in general3%
B22DCasting of metals3%
C30BSingle-crystal growth3%
E21CMining or quarrying3%
PatentTitleYear
9,461,329'Power generation system'20169,359,870'Method and system for recovering ocean floor hydrothermal mineral resources'20169,343,295'Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium'20169,252,001'Plasma processing apparatus, plasma processing method and storage medium'20169,202,731'Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein'20159,165,810'Conveyance device and substrate processing system'20158,696,814'Film deposition apparatus and film deposition method'20148,636,871'Plasma processing apparatus, plasma processing method and storage medium'20148,419,960'Plasma processing apparatus and method'20137,642,193'Method of treating a mask layer prior to performing an etching process'20107,572,386'Method of treating a mask layer prior to performing an etching process'20097,449,414'Method of treating a mask layer prior to performing an etching process'20085,137,077'Method of controlling flow of molten steel in mold'1992

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1992–2015Based in Kawasaki, JP· patent location history
2008–2016Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
2008–2010Based in Kanagawa, JP· patent location history
2013–2015Patents assigned to SAWADA IKUO (4)· patent assignee history
2013–2014Patents assigned to KANG SONGYUN (2)· patent assignee history
2013–2015Patents assigned to KASAI SHIGERU (2)· patent assignee history
2013–2016Based in Nirasaki, JP· patent location history
2014Patents assigned to AKETA MASATOSHI (1)· patent assignee history
2016Based in Yokosuka, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD102008–2016
SAWADA IKUOself42013–2015
KANG SONGYUN22013–2014
KASAI SHIGERU22013–2015
AKETA MASATOSHI12014
Locations
LocationPatentsSpan
Nirasaki, JP62013–2016
Kanagawa, JP32008–2010
Yokosuka, JP22016
Kawasaki, JP21992–2015