Inventor
Akihisa Nagano
Inventor
Tokyo, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Gprimary
H05GX-ray technique29%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices14%
H05HPlasma technique14%
G01FMeasuring volume, volume flow, mass flow or liquid level7%
G05DSystems for controlling or regulating non-electric variables7%
G21KHandling of particles or ionising radiation not otherwise provided for7%
H01JElectric discharge tubes or discharge lamps7%
H01LSemiconductor devices7%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h107%
PatentTitleYear
10,609,802High-temperature plasma raw material supply apparatus and extreme ultra violet light source apparatus202010,591,342Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device202010,285,253Discharge electrodes and light source device201910,143,075Device for emitting extreme ultraviolet light2018Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2018–2020Patents assigned to USHIO ELECTRIC INC (4)· patent assignee history
2018Based in Gotenba, JP· patent location history
2019–2020Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| USHIO ELECTRIC INC | 4 | 2018–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tokyo, JP | 3 | 2019–2020 |
| Gotenba, JP | 1 | 2018 |