Inventor
Chiukin Steven Lai
Inventor
Sunnyvale, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1026%
H01LSemiconductor devices21%
C23CCoating metallic material13%
C23FNon-mechanical removal of metallic material from surface4%
H10BElectronic memory devices4%
C23GCleaning or de-greasing of metallic material by chemical methods other than electrolysis2%
H01JElectric discharge tubes or discharge lamps2%
H10DInorganic electric semiconductor devices2%
PatentTitleYear
10,777,453Low resistivity films containing molybdenum202010,731,250Depositing ruthenium layers in interconnect metallization202010,510,590Low resistivity films containing molybdenum201910,438,847Manganese barrier and adhesion layers for cobalt201910,283,404Selective deposition of WCN barrier/adhesion layer for interconnect201910,229,826Systems and methods for forming low resistivity metal contacts and interconnects by reducing and removing metallic oxide20199,972,504Atomic layer etching of tungsten for enhanced tungsten deposition fill20189,748,137'Method for void-free cobalt gap fill'20179,362,163'Methods and apparatuses for atomic layer cleaning of contacts and vias'20168,617,348'Modulating etch selectivity and etch rate of silicon nitride thin films'20138,187,486'Modulating etch selectivity and etch rate of silicon nitride thin films'20127,977,249'Methods for removing silicon nitride and other materials during fabrication of contacts'2011Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2011–2013Patents assigned to NOVELLUS SYSTEMS INC (3)· patent assignee history
2011–2020Based in Sunnyvale, CA, US· patent location history
2012–2013Patents assigned to LAI CHIUKIN STEVEN (2)· patent assignee history
2012–2013Patents assigned to LIU XINYE (2)· patent assignee history
2016–2020Patents assigned to LAM RES CORP (9)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 9 | 2016–2020 |
| NOVELLUS SYSTEMS INC | 3 | 2011–2013 |
| LAI CHIUKIN STEVENself | 2 | 2012–2013 |
| LIU XINYE | 2 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 12 | 2011–2020 |