Inventor
Aaron Eppler
Inventor
Fremont, CA, US
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1039%
H01JElectric discharge tubes or discharge lamps17%
H01LSemiconductor devices17%
H10BElectronic memory devices6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
Y10TTechnical subjects covered by former us classification6%
C23CCoating metallic material3%
G05BControl or regulating systems in general3%
H05HPlasma technique3%
Y02PClimate change mitigation technologies in the production or processing of goods3%
PatentTitleYear
10,763,142System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter202010,446,394Spacer profile control using atomic layer deposition in a multiple patterning process201910,242,883High aspect ratio etch of oxide metal oxide metal stack20199,899,227'System, method and apparatus for ion milling in a plasma etch chamber'20189,659,783'High aspect ratio etch with combination mask'20179,018,103'High aspect ratio etch with combination mask'20157,682,480'Photoresist conditioning with hydrogen ramping'20107,645,707'Etch profile control'20107,547,635'Process for etching dielectric films with improved resist and/or etch profile characteristics'20097,544,521'Negative bias critical dimension trim'20097,405,521'Multiple frequency plasma processor method and apparatus'20087,135,410'Etch with ramping'20067,053,003'Photoresist conditioning with hydrogen ramping'20066,921,724'Variable temperature processes for tunable electrostatic chuck'20056,824,627'Stepped upper electrode for plasma processing uniformity'20046,391,787'Stepped upper electrode for plasma processing uniformity'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2020Patents assigned to LAM RES CORP (16)· patent assignee history
2002–2004Based in El Cerrito, CA, US· patent location history
2005–2020Based in Fremont, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 16 | 2002–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 14 | 2005–2020 |
| El Cerrito, California, US | 2 | 2002–2004 |