Inventor
Richard Carl Zimmerman
Inventor
Brookfield, CT, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices43%
G02BOptical elements, systems or apparatus26%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
H01JElectric discharge tubes or discharge lamps9%
H05GX-ray technique4%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h104%
PatentTitleYear
11,126,007Beam splitting prism systems202110,809,193Inspection apparatus having non-linear optics202010,747,010Beam splitting prism systems202010,529,529Electron-beam spot optimization202010,453,643Shielded, transmission-target, x-ray tube20199,134,620'Double EUV illumination uniformity correction system and method'20159,075,324'Beam positioning and pointing'20158,629,973'Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation'20148,009,269'Optimal rasterization for maskless lithography'20117,525,641'System and method for uniformity correction'20097,333,176'De-focus uniformity correction'20087,173,688'Method for calculating an intensity integral for use in lithography systems'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2021Patents assigned to ASML HOLDING NV (10)· patent assignee history
2007–2021Based in Brookfield, CT, US· patent location history
2011–2020Patents assigned to ASML NETHERLANDS BV (3)· patent assignee history
2014–2015Patents assigned to ZIMMERMAN RICHARD CARL (3)· patent assignee history
2014Patents assigned to CSISZAR SZILARD ISTVAN (1)· patent assignee history
2019–2020Patents assigned to MOXTEK INC (2)· patent assignee history
2019–2020Based in Payson, UT, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML HOLDING NV | 10 | 2007–2021 |
| ASML NETHERLANDS BV | 3 | 2011–2020 |
| ZIMMERMAN RICHARD CARLself | 3 | 2014–2015 |
| MOXTEK INC | 2 | 2019–2020 |
| CSISZAR SZILARD ISTVAN | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Brookfield, CT, US | 10 | 2007–2021 |
| Payson, UT, US | 2 | 2019–2020 |