Inventor
Chi Yang
Inventor
Taichung, TW
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices18%
H01LSemiconductor devices18%
H05GX-ray technique18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
C23CCoating metallic material6%
C25DProcesses for the electrolytic or electrophoretic production of coatings6%
G06TImage data processing or generation, in general6%
H10DInorganic electric semiconductor devices6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
PatentTitleYear
11,013,097Apparatus and method for generating extreme ultraviolet radiation202111,004,746Method for forming a semiconductor structure using dehydrating chemical, and method for forming a semiconductor structure202111,003,067Pressurized tin collection bucket with in-line draining mechanism202110,990,026Lithography apparatus and cleaning method thereof202110,991,604Method of manufacturing semiconductor structure202110,955,750Lithography system and method thereof20217,529,406'High speed and high accuracy image adjusting apparatus and method thereof'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009Patents assigned to QUANTA COMP INC (1)· patent assignee history
2009Based in Taipei, TW· patent location history
2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (6)· patent assignee history
2021Based in Taichung, TW· patent location history
2021Based in Hsinchu, TW· patent location history
2021Based in Tainan, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 6 | 2021 |
| QUANTA COMP INC | 1 | 2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Taichung, TW | 3 | 2021 |
| Hsinchu, TW | 2 | 2021 |
| Tainan, TW | 1 | 2021 |
| Taipei, TW | 1 | 2009 |