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Inventor

KUO-FENG TSENG

Inventor
US

Overview

2→
Patents
2022–2023
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps67%
G01NInvestigating or analysing materials by determining their chemical or physical properties33%
PatentTitleYear
11,815,473Methods of inspecting samples with multiple beams of charged particles202311,302,512Electron beam inspection apparatus stage positioning2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2023Patents assigned to ASML NETHERLANDS BV (2)· patent assignee history
2022–2023Based in US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV22022–2023
Locations
LocationPatentsSpan
US22022–2023