Inventor
Norio Semba
Inventor
Kumamoto, JP
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices28%
B05CApparatus for applying fluent materials to surfaces, in general8%
B01DSeparation5%
B05DProcesses for applying fluent materials to surfaces, in general5%
F24FAir-conditioning5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
B05BSpraying apparatus3%
G03DApparatus for processing exposed photographic materials3%
Y02PClimate change mitigation technologies in the production or processing of goods3%
PatentTitleYear
6,368,776'Treatment apparatus and treatment method'20026,338,474'Air feeder provided with by-pass bypassing cooling section, substrate processing apparatus including the same, and air supply method'20026,332,724'Substrate processing apparatus'20016,333,003'Treatment apparatus, treatment method, and impurity removing apparatus'20016,268,013'Coating a resist film, with pretesting for particle contamination'20016,217,657'Resist processing system having process solution deaeration mechanism'20016,133,981'Processing system'20006,063,439'Processing apparatus and method using solution'20006,033,475'Resist processing apparatus'20006,015,066'Liquid supplying device'20005,944,894'Substrate treatment system'19995,938,847'Method and apparatus for coating a film on an object being processed'19995,866,307'Resist processing method and resist processing system'19995,854,953'Method for developing treatment'19985,826,129'Substrate processing system'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2002Patents assigned to TOKYO ELECTRON LTD (15)· patent assignee history
1998–2002Based in Kumamoto, JP· patent location history
2002Based in Kikuchi-gun, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 15 | 1998–2002 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kumamoto, JP | 14 | 1998–2002 |
| Kikuchi-gun, JP | 1 | 2002 |