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Inventor

Srihari Ponnekanti

Inventor
Santa Clara, CA, US

Overview

3→
Patents
1998–2000
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps30%
C23CCoating metallic material20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests20%
B08BCleaning in general10%
PatentTitleYear
6,159,333'Substrate processing system configurable for deposition or cleaning'20005,997,685'Corrosion-resistant apparatus'19995,810,937'Using ceramic wafer to protect susceptor during cleaning of a processing chamber'1998

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1998–2000Patents assigned to APPLIED MATERIALS INC (3)· patent assignee history
1998–2000Based in Santa Clara, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC31998–2000
Locations
LocationPatentsSpan
Santa Clara, California, US31998–2000