Inventor
James P. Garcia
Inventor
Santa Clara, CA, US
Overview
Patents· 23 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests29%
B08BCleaning in general13%
C25DProcesses for the electrolytic or electrophoretic production of coatings13%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
A45DHairdressing or shaving equipment2%
A63HToys, e.g. tops, dolls, hoops or building blocks2%
B05CApparatus for applying fluent materials to surfaces, in general2%
C23CCoating metallic material2%
G01PMeasuring linear or angular speed, acceleration, deceleration, or shock2%
PatentTitleYear
7,862,663'Methods for processing a substrate with a flow controlled meniscus'20117,520,285'Apparatus and method for processing a substrate'20097,464,719'Multi-menisci processing apparatus'20087,395,611'System processing a substrate using dynamic liquid meniscus'20087,389,783'Proximity meniscus manifold'20087,387,689'Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces'20087,383,844'Meniscus, vacuum, IPA vapor, drying manifold'20087,350,316'Meniscus proximity system for cleaning semiconductor substrate surfaces'20087,234,477'Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces'20077,198,055'Meniscus, vacuum, IPA vapor, drying manifold'20077,192,488'Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus'20077,143,527'System and method for modulating flow through multiple ports in a proximity head'20067,127,831'Methods and systems for processing a substrate using a dynamic liquid meniscus'20067,069,937'Vertical proximity processor'20067,003,899'System and method for modulating flow through multiple ports in a proximity head'20067,000,622'Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus'20066,988,327'Methods and systems for processing a substrate using a dynamic liquid meniscus'20066,910,240'Wafer bevel edge cleaning system and apparatus'20056,851,436'Substrate processing using a fluid re-circulation system in a wafer scrubbing system'20056,593,241'Method of planarizing a semiconductor device using a high density plasma system'20035,304,398'Chemical vapor deposition of silicon dioxide using hexamethyldisilazane'19945,047,653'Device on board a moving vehicle to obtain signals representative of the relative speed of the vehicle with respect to an ambient fluid'19914,197,358'Flexible statue'1980Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1980Patents assigned to GARCIA JAMES (1)· patent assignee history
1980Based in Brooklyn, NY, US· patent location history
1991Patents assigned to THOMSON CSF (1)· patent assignee history
1991Based in Bondy, FR· patent location history
1994Patents assigned to WATKINS JOHNSON CO (1)· patent assignee history
1994Based in Sunnyvale, CA, US· patent location history
2003Patents assigned to APPLIED MATERIALS INC (1)· patent assignee history
2003–2011Based in Santa Clara, CA, US· patent location history
2005–2011Patents assigned to LAM RES CORP (19)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 19 | 2005–2011 |
| APPLIED MATERIALS INC | 1 | 2003 |
| GARCIA JAMESself | 1 | 1980 |
| THOMSON CSF | 1 | 1991 |
| WATKINS JOHNSON CO | 1 | 1994 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 20 | 2003–2011 |
| Sunnyvale, California, US | 1 | 1994 |
| Bondy, FR | 1 | 1991 |
| Brooklyn, New York, US | 1 | 1980 |