Inventor
Boris Habets
Inventor
Dresden, DE
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01LSemiconductor devices22%
G05BControl or regulating systems in general14%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
Y02PClimate change mitigation technologies in the production or processing of goods6%
PatentTitleYear
10,739,688Method and apparatus for fabricating wafer by calculating process correction parameters202010,739,685Process control method for lithographically processed semiconductor devices202010,699,971Method for processing of a further layer on a semiconductor wafer202010,379,447Method and apparatus for simulation of lithography overlay201910,310,490Method and apparatus of evaluating a semiconductor manufacturing process201910,295,914Method and apparatus for fabricating wafer by calculating process correction parameters201910,234,401Method of manufacturing semiconductor devices by using sampling plans201910,008,422Method for assessing the usability of an exposed and developed semiconductor wafer20189,543,223'Method and apparatus for fabricating wafer by calculating process correction parameters'20178,440,475'Alignment calculation'20137,783,444'Systems and methods of alternative overlay calculation'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2013Patents assigned to QIMONDA AG (2)· patent assignee history
2010–2020Based in Dresden, DE· patent location history
2013–2019Patents assigned to HABETS BORIS (4)· patent assignee history
2013Patents assigned to HENKE WOLFGANG (1)· patent assignee history
2013Patents assigned to KUPERS MICHIEL (1)· patent assignee history
2017–2020Patents assigned to QONIAC GMBH (9)· patent assignee history
2017–2019Based in Dreseden, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| QONIAC GMBH | 9 | 2017–2020 |
| HABETS BORISself | 4 | 2013–2019 |
| QIMONDA AG | 2 | 2010–2013 |
| HENKE WOLFGANG | 1 | 2013 |
| KUPERS MICHIEL | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Dresden, DE | 9 | 2010–2020 |
| Dreseden, DE | 2 | 2017–2019 |