Inventor
Yun Kwang Jeon
Inventor
Seoul, KR
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01LSemiconductor devices21%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light7%
H04NPictorial communication, e.g. television7%
H05HPlasma technique7%
PatentTitleYear
10,971,333Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same202110,971,343Apparatus for monitoring process chamber202110,903,053Plasma processing apparatus202110,896,838Electrostatic chucks and substrate processing apparatus including the same20215,377,211'Method and apparatus for Raman laser oscillation using stimulated Brilllouin scattering'1994Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1994Patents assigned to AGENCY DEFENSE DEV (1)· patent assignee history
1994Based in Daejon, KR· patent location history
2021Patents assigned to SAMSUNG ELECTRONICS CO LTD (4)· patent assignee history
2021Based in Seoul, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 4 | 2021 |
| AGENCY DEFENSE DEV | 1 | 1994 |
Locations
| Location | Patents | Span |
|---|---|---|
| Seoul, KR | 4 | 2021 |
| Daejon, KR | 1 | 1994 |