Inventor

David Shanner

Inventor

Georgetown, MA, US

Overview

2015

Patent span

Electricity

Primary field (CPC H)

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary

H01JElectric discharge tubes or discharge lamps25%

H01LSemiconductor devices25%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests25%

PatentTitleYear

Assembled from patent assignee/location history and declaration credentials.

2015Patents assigned to AXCELIS TECH INC (1)· patent assignee history

2015Based in Georgetown, MA, US· patent location history

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
AXCELIS TECH INC	1	2015

Locations

Location	Patents	Span
Georgetown, Massachusetts, US	1	2015