LexDanaLexDanabeta
Inventor

Nobuo Hirano

Inventor
Ibaraki, JP

Overview

2→
Patents
1997–1998
Patent span
Performing operations
Primary field (CPC B)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general25%
B23DPlaning25%
H05HPlasma technique25%
Y10TTechnical subjects covered by former us classification25%
PatentTitleYear
5,820,320'Apparatus for treating the inner surface of vacuum chamber'19985,626,682'Process and apparatus for treating inner surface treatment of chamber and vacuum chamber'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997–1998Patents assigned to HITACHI LTD (2)· patent assignee history
1997–1998Based in Ibaraki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI LTD21997–1998
Locations
LocationPatentsSpan
Ibaraki, JP21997–1998