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Inventor

Gregory H. Bogush

Inventor
Aurora, IL, US

Overview

3→
Patents
2003–2010
Patent span
Chemistry
Primary field (CPC C)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C09Gprimary
C09GPolishing compositions30%
C09KMaterials for miscellaneous applications, not provided for elsewhere30%
B24BMachines, devices, or processes for grinding or polishing20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
PatentTitleYear
7,677,956'Compositions and methods for dielectric CMP'20106,726,534'Preequilibrium polishing method and system'20046,612,911'Alkali metal-containing polishing system and method'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003–2010Patents assigned to CABOT MICROELECTRONICS CORP (3)· patent assignee history
2003–2010Based in Aurora, IL, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
CABOT MICROELECTRONICS CORP32003–2010
Locations
LocationPatentsSpan
Aurora, Illinois, US32003–2010